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Electronics and Semiconductors

Multifunctional lubricants for the protection of sensitive electronic components

In electronics and semiconductor manufacturing, contamination can affect equipment accuracy, operational reproducibility and equipment life. When used in vacuum pumps and clean rooms, high-performance lubricants help reduce contaminants and volatile gases generated in the spaces where electronics and semiconductors are manufactured. This results in increased throughput while extending the life of the equipment.

Versatile, high-temperature, corrosion-resistant lubricants (greases, oils and vacuum pump oils) can also be used in a variety of line components, including

  • Bearings
  • Valves
  • Seals
  • O-rings
  • Chains
  • Compressor
  • Gearboxes
  • Mechanical pumps and other components

Norbert® performance lubricants provide superior safety and protection for the electronics and semiconductor industries. These long-lasting lubricants and greases are commonly used in oil pumps, dry pumps, vacuum systems, clean rooms, robotic systems and more. In these applications, Norbert® Performance Lubricants have been consistently recognized by major vacuum pump manufacturers and OEM equipment suppliers for meeting or exceeding warranty requirements.

High Stability Safety Lubricants for Cleanrooms

Norbert® performance lubricants can withstand extreme temperatures and pressures, and in doing so, they surpass hydrocarbon greases, silicone greases and chlorofluorocarbon greases in providing a more stable operating environment for sensitive electronic components.

Norbert® performance lubricants are chemically and biologically inert, making them compatible with oxygen and non-reactive with virtually all chemicals, plastics, metals and elastomers.

Norbert® lubricants not only provide consistent and safe performance under severe conditions, but they also last longer, eliminating the need for frequent component replenishment.

Norbert® performance lubricants also offer additional properties especially suited for the electronics and semiconductor industries, including

  • Excellent vapor pressure, with vapor pressures as low as 10-13 mmHg over the -15°C to 300°C (5°F to 572°F) temperature range
  • Does not react with acidic or alkaline cleaners, disinfectants, vapors and moisture, thus preventing damage to components
  • Safe to use, contains no volatile organic compounds (VOCs) or chlorine
  • Minimal environmental footprint - lubricant is renewable
  • Compatible with chemicals commonly used in industry

Special Norbert® lubricants

Norbert® VPF (vacuum pump oil)

Norbert® VPF is useful in areas where traditional vacuum pump oils can cause safety, waste disposal and maintenance problems.Norbert® VPF is highly stable and helps reduce waste and maintenance related problems. Its non-flammability reduces the risk of fire in the pump.

In addition, Norbert® VPF does not contain acetal groups, making it less susceptible to Lewis acid, a key element in the semiconductor process. With these unique properties, Norbert® VPF has gained widespread acceptance by leading vacuum pump manufacturers.

Norbert® LVP (Low Vapor Pressure) Grease

Norbert® LVP grease will not explode, burn, decompose or react to form gels or solid deposits, nor will it promote ignition.

For more information, please visit the product page.